The measurement area is increased by placing micro sensors in a reaction area intensively. Additionally, the size of a micro temperature sensor is decreased to measure the temperature variation of a small area and decrease the thickness of sensing membranes in order to increase the reaction selleck bio rate. Electrode length of the proposed micro temperature Inhibitors,Modulators,Libraries sensor is 260 ��m and the width is 300 ��m; both the line width and interval are 20 ��m as shown in Figure 1. Three micro temperature sensors are placed in one group, in which nine groups are set at the upstream, midstream and downstream of the micro flow plate, as well as one group at the inlet and one at the outlet. Figure 2 shows the micro temperature sensors distribution.Figure 1.Electrode dimensions of a micro temperature sensor (units: ��m).

Figure 2.Micro temperature sensor distribution.2.3. Fabrication of a Micro Flow PlateA micro flow plate is manufactured Inhibitors,Modulators,Libraries based on MEMS technology, in which SUS 304 is used as the substrate and the thickness of SUS 304 is 600 ��m. Figure 3 illustrates the process. An E-beam evaporator is used to Inhibitors,Modulators,Libraries deposit 500 ? of titanium on stainless steel to function as a sticking layer, followed by use of spin coater coating Hexamethyldisilazane (HMDS) as the sticking layer for the Inhibitors,Modulators,Libraries photoresist. Photoresist AZ-4620 is then coated on stainless steel to function as the etching mask. Next, an aligner and mask are used to make a transition graph for the photoresist, followed by use of MP2500 + H2O to define the pattern. Following development, titanium and aqua regia are etched using hydrofluoric acid to etch stainless steel, followed by removal of the titanium mask and photoresist.

Next, pattern is cut to the desired shape by wire cutting. Figure 4 illustrates the finished product.Figure 3.Process sketch of a micro flow plate.Figure 4.Planer GSK-3 micro flow plate: (a) surface; (b) sectional.2.4. Fabrication of a Flexible Micro Temperature SensorThe material of the micro temperature sensor is gold, and 40 ��m thick stainless steel foil was used as the substrate. Regardless of whether wet etching or metal lift-off is used, a layer of insulating material is coated, explaining our use of RF sputter to grow 1,000 ? of aluminum nitride (AlN).Next an E-beam evaporator is used to deposit 200 ? of chromium to be sticking layer. 2,000 ? of gold is then deposited.

Next, photolithography is performed to define the pattern of a micro temperature sensor, followed by use of etching liquid to etch gold. Finally, fabrication of the micro temperature sensor is completed after removing the photoresist layer. Figure 5 shows the www.selleckchem.com/products/mek162.html micro temperature sensor, while Figure 6 shows the optical microscope diagram of the micro temperature sensor. Figure 7 schematically depicts the structure of the micro reformer combined with flexible micro temperature sensors.Figure 5.Process sketch of a micro temperature sensor.Figure 6.